Acid‐catalyzed degradation mechanism of poly(phthalaldehyde): Unzipping reaction of chemical amplification resist

Autor:	Rie Nishida, Minoru Tsuda, Masayuki Hata, Setsuko Oikawa
Rok vydání:	1997
Předmět:	Reaction mechanism Polymers and Plastics Organic Chemistry Cationic polymerization Protonation Catalysis chemistry.chemical_compound Acid catalysis Monomer chemistry Polymer chemistry Materials Chemistry Organic chemistry Hemiacetal Phthalaldehyde
Zdroj:	Journal of Polymer Science Part A: Polymer Chemistry. 35:77-89
ISSN:	1099-0518 0887-624X
DOI:	10.1002/(sici)1099-0518(19970115)35:1<77::aid-pola9>3.0.co;2-#
Popis:	The acid-catalyzed degradation mechanism of chemical amplification resists based on end-capped poly(phthalaldehyde) has been elucidated by semi-empirical molecular orbital calculations. It is concluded that: (i) two different starting points exist in the degradation of end-capped poly(phthalaldehyde), the central part of the polymer as well as the polymer end; (ii) in both cases, after the first protonation, cationic hydroxyl compounds generated decompose to the identical cation intermediate, which can unzip itself to phthalaldehyde monomers successively (unzipping reaction); (iii) the hemiacetal type intermediates hardly degrade to the same intermediate without acid catalyst; (iv) the overall activation energy for the degradation reaction is less than 14 kcal/mol in all the cases. Thus, the poly(phthalaldehyde) resist can easily self-develop below 100°C, as reported in the literature.
Databáze:	OpenAIRE
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