Microfabrication of Silicon/Ceramic Hybrid Cantilever for Scanning Probe Microscope and Sensor Applications
| Autor: | Yasuaki Matsuda, Nobuya Iwata, Nozomi Tanifuji, Syoji Yamada, Takayuki Wakayama, Toshinari Kobayashi |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Scanning Hall probe microscope
Materials science Cantilever Silicon business.industry Atomic force acoustic microscopy chemistry.chemical_element Nanotechnology Scanning probe microscopy chemistry visual_art visual_art.visual_art_medium Optoelectronics Ceramic Magnetic force microscope business Non-contact atomic force microscopy |
| Zdroj: | AIP Conference Proceedings. |
| ISSN: | 0094-243X |
| DOI: | 10.1063/1.1639705 |
| Popis: | We present here new cantilevers for scanning probe microscopy (SPM) and sensor applications, which consist of silicon cantilever beam and ceramic pedestal. Silicon is only used to make cantilever beams and tips. Precision‐machinery‐made ceramics replaces silicon pedestal part. The ceramics was recently developed by Sumikin Ceramics and Quarts Co., Ltd. and can be machined precisely with end mill cutting. Many silicon beams are fabricated at once from a wafer using batch fabrication method. Therefore, SPM probes can be fabricated in high productivity and in low cost. These beams are transferred with transfer technique and are bonded on the ceramic pedestal with epoxy glue. We demonstrate here atomic force microscope (AFM) and gas sensor applications of the hybrid structure. In a gas sensor application, the ends of the cantilever are selectively modified with zeolite crystals as a sensitive layer. The bonding strength is enough for each application. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|