Advanced process control for high quality R&D and production of MOVPE material by RealTemp™

Autor:	Bernhard Hirschauer, H. Malm, Carl Asplund, Jan Borglind, A. Parekh, S. Becanovic
Rok vydání:	2003
Předmět:	Reproducibility Fabrication business.industry Chemistry Photodetector Condensed Matter Physics Epitaxy Inorganic Chemistry Optics Materials Chemistry Optoelectronics Metalorganic vapour phase epitaxy Thin film business Quantum well infrared photodetector Quantum well
Zdroj:	Journal of Crystal Growth. 248:229-234
ISSN:	0022-0248
Popis:	Acreo AB has made substantial efforts to create reproducible metalorganic vapor phase epitaxy (MOVPE) processes for the fabrication of AlGaAs/GaAs-based quantum well infrared photodetector arrays. The focus has been on two demanding areas: high reproducibility and high spatial uniformity both in material composition and in geometry. Statistical data was collected during 21 months of production. Reproducibility performance of ±3% in thickness and ±1% in composition, which has been achieved by the means of emissivity-compensated pyrometry (ECP) by using RealTemp™ control, is reported. Spatial uniformity in composition of ±0.5% and in geometry of ±1.0% is reached.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c17dbf86ab3f531a9b54fcb8f60cfac6 https://doi.org/10.1016/s0022-0248(02)01849-3 Zobrazit plný text záznamu Full Text from ScienceDirect