Varying the Composition of Ferroelectric Films during Ion-Plasma Sputtering: Simulation and Experiment
| Autor: | M. V. Zlygostov, V. A. Volpyas, A. A. Odinets, E. N. Sapego, Andrey Tumarkin |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Range (particle radiation) Materials science Analytical chemistry General Physics and Astronomy 02 engineering and technology Plasma 021001 nanoscience & nanotechnology 01 natural sciences Ferroelectricity Titanate Ion Sputtering visual_art 0103 physical sciences visual_art.visual_art_medium Ceramic 0210 nano-technology Solid solution |
| Zdroj: | Bulletin of the Russian Academy of Sciences: Physics. 82:346-351 |
| ISSN: | 1934-9432 1062-8738 |
| Popis: | Varying the elemental composition of ferroelectric thin films of barium strontium titanate, barium zirconate titanate, and barium stannate titanate solid solutions obtained by ion-plasma sputtering of ceramic targets at different pressures of the working gas is studied through simulation and experimentally. The experimental results are interpreted based on statistical simulation of the transport processes for fluxes of sputtered Ba, Sr, Sn, Zr, and Ti atoms in a gas medium. It is shown that the simulation results describe variations in the elemental composition satisfactorily (within 5%) in a wide range of working gas pressures. Theoretical and experimental studies enable us to choose the optimum values of technological parameters for obtaining ferroelectric thin films with specified elemental compositions that determine their electrophysical properties. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink