Transparent conducting aluminum-doped zinc oxide thin film prepared by sol–gel process followed by laser irradiation treatment
| Autor: | Chun-Sing Lee, Man-Keung Fung, F.L. Wong, J.C. Chang, Shuit-Tong Lee, W.M. Tsang |
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| Rok vydání: | 2008 |
| Předmět: |
Materials science
Scanning electron microscope Annealing (metallurgy) Metals and Alloys Analytical chemistry chemistry.chemical_element Surfaces and Interfaces Zinc Laser Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Chemical engineering chemistry law Materials Chemistry Irradiation Thin film Sol-gel Transparent conducting film |
| Zdroj: | Thin Solid Films. 517:891-895 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2008.08.157 |
| Popis: | Aluminum-doped zinc oxide (AZO) films were fabricated at a low substrate temperature (300 °C) in air by KrF excimer laser irradiation of sol–gel spin-coated films. Structural, electrical and optical properties of the laser-irradiated films at different laser energies were studied and compared with those prepared by conventional high-temperature processing. The 200 nm laser-irradiated AZO film shows a resistivity of 44 × 10 − 3 Ω-cm and about 90% optical transmittance in the visible range upon laser irradiation. The films were oriented preferentially along (002) direction. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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