Dual-frequency paired polarization phase shifting ellipsometer
| Autor: | Hui-Kang Teng, Chih-Jen Yu, Chien-Chung Tsai, Chu En Lin, Chien Chou |
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| Rok vydání: | 2009 |
| Předmět: |
Materials science
business.industry Dynamic range Linear polarization Polarization (waves) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Interferometry Optics Ellipsometry Phase noise Heterodyne detection Electrical and Electronic Engineering Physical and Theoretical Chemistry business Laser beams |
| Zdroj: | Optics Communications. 282:1516-1520 |
| ISSN: | 0030-4018 |
| DOI: | 10.1016/j.optcom.2009.01.001 |
| Popis: | A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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