Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

Autor:	Yong-Xin Liu, Quan-Zhi Zhang, You-Nian Wang, Demetre J. Economou, Kai Zhao
Rok vydání:	2021
Předmět:	Standing wave Nonlinear system Materials science business.industry Capacitive sensing Magnetic probe Power absorption Optoelectronics Electron Condensed Matter Physics business Joule heating Ohmic contact
Zdroj:	Plasma Science and Technology. 23:115404
ISSN:	1009-0630
DOI:	10.1088/2058-6272/ac1cce
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c161a4175b0f61495b95801268494900 https://doi.org/10.1088/2058-6272/ac1cce Zobrazit plný text záznamu