Performance Characteristics Of A Narrow Band Industrial Excimer Laser

Autor:	T. J. McKee, R. K. Brimacombe, E. D. Mortimer, B. Norris, T. A. Znotins, John Reid
Rok vydání:	1989
Předmět:	Materials science Excimer laser business.industry medicine.medical_treatment Laser law.invention Wavelength Laser linewidth Optics law medicine Optoelectronics Photolithography Spectroscopy business Tunable laser Spectral purity
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Popis:	In this paper, the performance characteristics of the INDEX 300 lithographic industrial excimer laser are presented. The laser operates with a linewidth of 3.0 pm and spectral purity of 94%. The wavelength stability is better than ± 1.0 pm over short and long term operation in both continuous and intermittent modes. By means of a novel technique, an absolute wavelength standard is used as a reference for wavelength stabilization. The advantages of this approach to wavelength stabilization are discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c1512d39bae1cd4653030108e8b291d1 https://doi.org/10.1117/12.953170 Zobrazit plný text záznamu