Physicochemical Processes in Alkaline Glass with Anodic Bonding of Glass and Silicon

Autor:	V. E. Pautkin
Rok vydání:	2021
Předmět:	010302 applied physics Physicochemical Processes Materials science Silicon chemistry.chemical_element 01 natural sciences 010309 optics chemistry Mechanics of Materials Anodic bonding 0103 physical sciences Materials Chemistry Ceramics and Composites Wafer Composite material
Zdroj:	Glass and Ceramics. 77:329-331
ISSN:	1573-8515 0361-7610
Popis:	The physicochemical processes occurring in the structure of alkaline glass and at a silicon – glass interface with anodic bonding of the glass and silicon wafers were studied. The bonding of these materials is now widely used in industry in the development of sensitive elements of micromechanical sensors, such as pressure, acceleration, and other sensors. It is shown that in order to obtain a high-quality bond both the parameters of the technological process (for example, the applied voltage) and the structural features of the bonded parts (for example, the thickness of the glass wafers) can be varied.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c14ab186ccc9945661366a8c2a220c35 https://doi.org/10.1007/s10717-021-00300-4 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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