Characterization and improvement of a YBCO multilayer film process for HTS circuit applications
| Autor: | C.L. Pettiette-Hall, M. Sergant, J.F. Burch, R.K. Ellis, M. Luong, J. Cordrump, R. Hu, J.M. Murduck |
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| Rok vydání: | 1997 |
| Předmět: |
Superconductivity
Fabrication High-temperature superconductivity Materials science business.industry Contact resistance Integrated circuit Dielectric Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention Taguchi methods law Optoelectronics Electrical and Electronic Engineering Resistor business |
| Zdroj: | IEEE Transactions on Appiled Superconductivity. 7:2057-2062 |
| ISSN: | 1051-8223 |
| DOI: | 10.1109/77.620995 |
| Popis: | We have developed a 2" multilayer HTS integrated circuit process which contains up to three superconducting YBCO layers, epitaxial dielectric (SrTiO/sub 3/ or SrTiO/sub 3/+Sr/sub 2/AlTaO/sub 6/ combination), Ag wiring, an integrated resistor and non-epitaxial Si/sub x/N/sub y/ dielectric. We have incorporated the use of n-factorial and Taguchi designed experiments to develop and optimize various aspects of this process. This article highlights the designed experiments which addressed fabrication issues for HTS superconducting crossovers, dielectric integrity, and HTS/Ag metal contact resistance. |
| Databáze: | OpenAIRE |
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