Boosting Qs of AlN Resonators by Redefining Acoustic Boundaries
| Autor: | Martin M. Winterkorn, Songbin Gong, Anming Gao, J. Provine, Yansong Yang, Ruochen Lu |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
Condensed matter physics 02 engineering and technology Nitride 021001 nanoscience & nanotechnology 01 natural sciences Resonator Lamb waves Reflection (mathematics) 0103 physical sciences Object-relational impedance mismatch Figure of merit Reflection coefficient 0210 nano-technology 010301 acoustics Energy (signal processing) |
| Zdroj: | 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/memsys.2019.8870846 |
| Popis: | This paper reports on a quality factor ( $Q$ )-boosting technique for aluminum nitride (AlN) Lamb wave resonators by lithographically defining their acoustic boundaries. The technique has been demonstrated to enhance resonator $Q$ from 980 to 3000 without compromising the electromechanical coupling $({k_{\mathrm{t}}}^{2}=1.75\%)$ , consequently resulting in a high figure of merit of 52.25 ( $\text{FoM}={k_{\mathrm{t}}}^{2}\cdot Q$ ). Our approach derives from our quantitative analysis of the reflection coefficient at the acoustic boundaries of a conventional Lamb wave AlN resonator, which suggests inadequate energy confinement from a reflection coefficient of only 0.47. A two-prong approach, which involves first defining the release regions lithographically and then adding a Pt layer regionally over the anchors, is adopted to create a more significant impedance mismatch at the acoustic boundaries and reduce energy leakage to the surrounding. |
| Databáze: | OpenAIRE |
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