MEMS Rogowski Coil Current Sensor with TSV Structural Wiring

Autor:	Katsuya Ikeda, Mutsuto Kato, Kazuyuki Sashida, Yoshiyuki Watanabe, Hiroki Murayama, Kenichi Yoshida, Toshiyuki Takemori, Toru Yahagi, Kosuke Ikeda
Rok vydání:	2021
Předmět:	Microelectromechanical systems Materials science business.industry Electrical engineering Current sensor Electrical and Electronic Engineering business Rogowski coil
Zdroj:	Journal of The Japan Institute of Electronics Packaging. 24:101-106
ISSN:	1884-121X 1343-9677
DOI:	10.5104/jiep.jiep-d-20-00043
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c11ab52ac9cef2bb286ee0718bdae819 https://doi.org/10.5104/jiep.jiep-d-20-00043 Zobrazit plný text záznamu