Effect of Co, Pt, and Au additions on the stability and epitaxy of NiSi2 films on (111)Si

Autor:	D. Mangelinck, P. Gas, J. M. Gay, B. Pichaud, O. Thomas
Rok vydání:	1998
Předmět:	Materials science Inorganic chemistry Nucleation General Physics and Astronomy chemistry.chemical_element Microstructure Standard enthalpy of formation Metal Nickel Crystallography chemistry visual_art visual_art.visual_art_medium Solubility Platinum Cobalt
Zdroj:	Journal of Applied Physics. 84:2583-2590
ISSN:	1089-7550 0021-8979
Popis:	We studied the effect of the addition of cobalt, platinum, or gold on the cell parameter of NiSi2 deposited epitaxially on (111)Si. Namely, the formation and the microstructure of NiSi2 films containing one of these elements are compared to those of the pure disilicide. The solubility of Co, Pt, and Au in NiSi2 ranges from a total substitution to nickel in the case of cobalt to a very weak quantity (less than 1%) in the case of platinum. An intermediate behavior was observed for gold which can occupy more than 10% of the metal sites. This important solubility has been confirmed by analysis of bulk Ni(Au) disilicides and is understood as a consequence of the metastability of gold silicides. Cobalt, Pt, and Au additions change the temperature of formation of NiSi2: from 800 °C for reaction with pure nickel, this temperature is lowered to 650 °C by Co and Au additions while it is increased to 950 °C for Pt. These modifications are consistent with the nucleation controlled formation of NiSi2 and the effect of...
Databáze:	OpenAIRE
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