Establishment of new process technology for EUV lithography

Autor:	Yuhei Kuwahara, Shinichiro Kawakami, Kanzo Kato, Soichiro Okada, Yuya Kamei, Tomoya Onitsuka, Takashi Yamauchi, Nanoka Miyahara, Congque Dinh, Lior Huli, Satoru Shimura
Rok vydání:	2023
Zdroj:	Advances in Patterning Materials and Processes XL.
DOI:	10.1117/12.2657076
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c0f6fe976d5db8dff2a7d3cc0c8999f6 https://doi.org/10.1117/12.2657076 Zobrazit plný text záznamu