Fabrication of embedded microfluidic channels in low temperature co-fired ceramic technology using laser machining and progressive lamination

Autor:	M. Farhan Shafique, Andrew Laister, Robert E. Miles, Ian D. Robertson, Michael Clark
Rok vydání:	2011
Předmět:	Materials science Fabrication business.industry Microfluidics Separator (oil production) Laser law.invention Machining law visual_art Lamination Materials Chemistry Ceramics and Composites visual_art.visual_art_medium Optoelectronics Ceramic Co-fired ceramic business
Zdroj:	Journal of the European Ceramic Society. 31:2199-2204
ISSN:	0955-2219
DOI:	10.1016/j.jeurceramsoc.2011.05.039
Popis:	This paper describes the application of laser micromachining techniques for the fabrication of microfluidic channels in low temperature co-fired ceramic, LTCC, technology. It is shown that embedded cavities can be successfully realised by employing a recently proposed progressive lamination process with no additional fugitive material. Various microfluidic structures have been fabricated and X-ray imaging has been used to assess the quality of the embedded channels after firing. The problem of achieving accurate alignment between LTCC layers is addressed such that deeper channels, spanning more than one layer, can be fabricated using a pre-lamination technique. A number of possible applications for the presented microfluidic structures are discussed and an H-filter particle separator in LTCC is demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c0f1b1361e9dba0230b595118792f9e6 https://doi.org/10.1016/j.jeurceramsoc.2011.05.039 Zobrazit plný text záznamu Full Text from ScienceDirect