The Effect of Operating Modes on the Response of Ammonia Sensors Based on Tin Dioxide Films

Autor:	V. M. Kalygina, N. K. Maksimova, A. V. Tsymbalov, E. V. Chernikov
Rok vydání:	2020
Předmět:	010302 applied physics Materials science Physics and Astronomy (miscellaneous) Tin dioxide Analytical chemistry chemistry.chemical_element 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Oxygen chemistry.chemical_compound Adsorption chemistry 0103 physical sciences Electrode Sapphire Thin film 0210 nano-technology Order of magnitude
Zdroj:	Technical Physics Letters. 46:480-483
ISSN:	1090-6533 1063-7850
DOI:	10.1134/s1063785020050284
Popis:	The influence of operating modes on the response of ammonia sensors based on tin dioxide films has been studied. Samples have been obtained as a result of high-frequency magnetron sputtering of a SnO2:Sb target on sapphire substrates with predeposited Pt electrodes and a heater. Varying the heating cycle duration and reducing the cooling cycle temperature may increase the response by one or two orders of magnitude. The results are explained as being due to the change in the density of chemically adsorbed oxygen on the surface of the SnO2:Sb film depending on the temperature regime.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c0efe805439a8e567e19caf2dfcac96a https://doi.org/10.1134/s1063785020050284 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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