Analytical Study of the Film Bulk Acoustic Resonators Based on Single Crystal LiNbO3 with Different Crystal Orientations
| Autor: | Jikui Luo, Weipeng Xuan, Feng Gao, Hao Jin, Jinkai Chen, Xingli He, Shurong Dong, Ting Wu, Xiaozhi Wang |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Materials science business.industry Crystal orientation 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electronic Optical and Magnetic Materials Crystal Resonator Control and Systems Engineering 0103 physical sciences Materials Chemistry Ceramics and Composites Optoelectronics Bulk acoustic wave Electrical and Electronic Engineering Wideband 0210 nano-technology business Single crystal |
| Zdroj: | Integrated Ferroelectrics. 213:182-193 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584587.2020.1859837 |
| Popis: | Film bulk acoustic resonator (FBAR) based on single crystal LiNbO3 are promising for next-generation high Q, wideband filters in telecommunications. The crystal orientation of LiNbO3 has significan... |
| Databáze: | OpenAIRE |
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