Post‐growth tuning of inverted cavity InGaAs/AlGaAs spatial light modulators using phase compensating dielectric mirrors

Autor:	Zaheed Karim, R. F. Cartland, Anupam Madhukar, Armand R. Tanguay, Li Chen, Chris Kyriakakis, Kezhong Hu
Rok vydání:	1995
Předmět:	Spatial light modulator Materials science Physics and Astronomy (miscellaneous) business.industry Bragg's law Dielectric Distributed Bragg reflector Indium tin oxide Optical modulator Optics Optoelectronics Contrast ratio business Fabry–Pérot interferometer
Zdroj:	Applied Physics Letters. 66:2774-2776
ISSN:	1077-3118 0003-6951
Popis:	A novel method is demonstrated for the correction of cavity thickness deviations imposed by technological limitations in the growth process of a resonant cavity spatial light modulator. This method is based on cavity phase compensation through the use of an externally‐deposited dielectric Bragg mirror and provides an effective means of optimizing the device characteristics. In particular, such mirrors can significantly relax otherwise stringent epitaxial growth requirements in the fabrication of hybrid silicon/compound‐semiconductor spatial light modulators incorporating Fabry–Perot cavities. We further demonstrate deposition of a conductive, index‐tunable indium tin oxide (ITO) antireflection coating that is designed to maximize the contrast ratio and throughput of the inverted‐cavity modulator configuration.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::c07ecc2b33ca3ac52355af786db83631 https://doi.org/10.1063/1.113471 Zobrazit plný text záznamu