Fabrication of waveguide-integrated suspended chalcogenide glass microdisk resonator
Autor: | Zelin Yang, Di Xia, Bin Zhang, Jingcui Song, Mingjie Zhang, Pingyang Zeng, Ying Zhu, Zhaohui Li, Zhenshi Chen, Lei Wan |
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Rok vydání: | 2020 |
Předmět: |
Fabrication
Materials science Scanning electron microscope business.industry Chalcogenide Chalcogenide glass 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Waveguide (optics) 010309 optics Resonator chemistry.chemical_compound chemistry Q factor 0103 physical sciences Optoelectronics 0210 nano-technology business Electron-beam lithography |
Zdroj: | Conference on Lasers and Electro-Optics. |
DOI: | 10.1364/cleo_at.2020.jtu2b.11 |
Popis: | We have demonstrated a waveguide-integrated suspended Geii.5As24Se64.5 microdisk with intrinsic quality factor of 1*106, which is the highest figure, to the best of our knowledge, with respect to reported thus far in suspended chalcogenide resonators. |
Databáze: | OpenAIRE |
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