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Transparent conductive oxides (TCOs) are critical materials in display manufacturing. For a long time these type of materials have been regarded purely as degenerated semiconductors, and the electrical contact resistance to metals has been neglected in comparison with the high resistivity of the bulk material. However, as the display size has increased and the contact area has decreased, a metal layer typically a titanium-aluminium composite has been added to reduce the conduction resistance, still with the TCO at the surface. Combined with the fact that the display industry is moving from Indium Tin Oxide (ITO) to Indium Zinc Oxide (IZO) as the preferred TCO material, the problem with contact resistance has emerged. The paper reports on the contact resistance between Au/ITO, NiAu/ITO, and Au/IZO. A circular transmission line method (CTLM) was used to investigate the contact resistance of metal deposited on top of ITO and IZO glass. Higher contact resistance of gold on IZO compare to that of ITO has been observed. Also the lower contact resistance result of NiAu-ITO compared to Au/ITO shows that we can improve contact resistance by optimising the metal system. |
