Metal-Germanium Contacts and Germanide Formation

Autor: D. M. Scott, E. D. Marshall, S. S. Lau, C. S. Pai, C. S. Wu
Rok vydání: 1985
Předmět:
Zdroj: MRS Proceedings. 47
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-47-161
Popis: In this study, we survey germanide formation and characterize Schottky- barrier properties for a number of representative metals on Ge (Al, Ag, Au, Er, Ni, Pd, Pt, Ta and Ti). It is found that the germanide formation characteristics (sequence of phase formation, kinetics, moving species) are similar to those of the corresponding silicides. The Schottky-barrier heights, however, are all similar and centered around 0.59 eV arida re relatively insensitive to the metallization.
Databáze: OpenAIRE