Radio‐frequency discharge source for beams of atomic nitrogen and oxygen
Autor: | J. E. Pollard |
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Rok vydání: | 1992 |
Předmět: | |
Zdroj: | Review of Scientific Instruments. 63:1771-1776 |
ISSN: | 1089-7623 0034-6748 |
DOI: | 10.1063/1.1143811 |
Popis: | Supersonic beams of atomic nitrogen and oxygen are produced by an electrodeless rf discharge within a ceramic nozzle. Mixtures of N2 or O2 seeded in He are heated by 100 W at 38 MHz with a stagnation pressure of 200–250 Torr. The flux of reactive atoms is 1–3×1018 sr−1 s−1 with stream velocities of 3.2–3.6 km/s and a velocity spread of 20% FWHM. The source is relatively simple to construct, because it requires only passive cooling for operation in vacuum. |
Databáze: | OpenAIRE |
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