Radio‐frequency discharge source for beams of atomic nitrogen and oxygen

Autor: J. E. Pollard
Rok vydání: 1992
Předmět:
Zdroj: Review of Scientific Instruments. 63:1771-1776
ISSN: 1089-7623
0034-6748
DOI: 10.1063/1.1143811
Popis: Supersonic beams of atomic nitrogen and oxygen are produced by an electrodeless rf discharge within a ceramic nozzle. Mixtures of N2 or O2 seeded in He are heated by 100 W at 38 MHz with a stagnation pressure of 200–250 Torr. The flux of reactive atoms is 1–3×1018 sr−1 s−1 with stream velocities of 3.2–3.6 km/s and a velocity spread of 20% FWHM. The source is relatively simple to construct, because it requires only passive cooling for operation in vacuum.
Databáze: OpenAIRE