Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD
| Autor: | Hirotaro Mori, Hiroshi Kawarada, Yoshihiro Yokota, Jin Wei, Hiroshi Fujita, Jun ichi Suzuki, Akio Hiraki, Jing Sheng Ma, Takao Yonehara |
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| Rok vydání: | 1990 |
| Předmět: |
Materials science
Material properties of diamond Abrasive Nucleation General Physics and Astronomy Diamond Surfaces and Interfaces General Chemistry Substrate (electronics) engineering.material Condensed Matter Physics Surfaces Coatings and Films Crystallography Chemical engineering Transmission electron microscopy engineering Irradiation Deposition (law) |
| Zdroj: | Applied Surface Science. :572-579 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/0169-4332(89)90124-4 |
| Popis: | Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH 4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO 2 -patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO 2 dots. |
| Databáze: | OpenAIRE |
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