Design of Aspherical Zoom Optical System in Immersion Lithography Lighting System

Autor:	李美萱 Li Meixuan, 王丽 Wang Li, 董连和 Dong Lianhe
Rok vydání:	2018
Předmět:	Optics Computer science business.industry Lighting system Zoom business Atomic and Molecular Physics and Optics Immersion lithography
Zdroj:	ACTA PHOTONICA SINICA. 47:122002
ISSN:	1004-4213
DOI:	10.3788/gzxb20184701.0122002
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bf9f549b9069e60276c428d179d02c2c https://doi.org/10.3788/gzxb20184701.0122002 Zobrazit plný text záznamu