Development of a modular, large-scale, high-throughput semicontinuous-mode liquid-phase epitaxy system

Autor:	James B. McNeely, P. E. Sims, P.I Rabinowitz, Michael G. Mauk, Allen Barnett, Robert B. Hall, W Bloothoofd, S.R. Collins, L. C. Dinetta, Z.A Shellenbarger
Rok vydání:	2000
Předmět:	Materials science business.industry Heterojunction Modular design Condensed Matter Physics Epitaxy law.invention Inorganic Chemistry Semiconductor Optics Thermophotovoltaic law Materials Chemistry Optoelectronics business Throughput (business) Order of magnitude Light-emitting diode
Zdroj:	Journal of Crystal Growth. 211:411-415
ISSN:	0022-0248
DOI:	10.1016/s0022-0248(99)00805-2
Popis:	We describe the design, operation, and performance of a high-throughput, large-scale liquid-phase epitaxy system for producing semiconductor optoelectronic devices. This system operates in a semicontinuous mode with high deposition rates and produces uniform, device-quality AlGaAs epitaxial structures on 75-mm (3″) diameter GaAs substrates. The system has a modular design and can be readily adapted for growth of multilayer heterostructures. This new LPE system represents a two order of magnitude improvement in areal throughput compared to conventional horizontal slideboat systems and has applications for LEDs, thermophotovoltaic devices, solar cells, and detectors.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bf8bd3ca4c6e22c0a55c3d76d8536781 https://doi.org/10.1016/s0022-0248(99)00805-2 Zobrazit plný text záznamu Full Text from ScienceDirect