| Popis: |
Ferroelectric thin film of Pb(ZrTi)O3 (PZT) was deposited on lattice mismatched (0001)sapphire for substratetemperatures T1 in the region from 470 to 590 °C and oxygen pressure of 200 and 900 mTorr. StrUctUral properties were characterized by XRD. Improvement ofXRD patterns of deposited films with postannealing temperature of the furnace sstudied. The development of the plasma plume shape from PZT target under changing deposition conditions wasinvestigated by CCD camera. Results show strong dependence of plume shape with oxygen pressure and laser beam spot size. 1. INTRODUCTION In the past several years, the interest in the use of ferroelectric films has greatly increased due to their potential applications. Recent research interest has been focused on the development of a radiation hard nonvolatile memoiy with the most investigated material Pb(Zr,Ti1.,)O3 (PZT). Beside direct industrial applications the PZT films are interesting for fundamental research in theoretical and applied physics. |
