In situx-ray diffraction observation of multiple texture turnovers in sputtered Cr films
| Autor: | Z. U. Rek, Z. B. Zhao, J. C. Bilello, Steven M. Yalisove |
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| Rok vydání: | 2004 |
| Předmět: | |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:2365-2372 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.1804984 |
| Popis: | A series of Cr films were deposited onto native oxides of (100) Si substrates via a confocal deposition geometry in a magnetron sputter chamber. The film growth chamber was incorporated with an in situ x-ray diffraction system, which allowed the collection of x-ray diffraction data on the growing film in a quasi real time fashion without interruption of film deposition. The in situ x-ray diffraction, coupled with other ex situ characterization techniques, was used to study structural evolutions of the Cr films deposited at various Ar pressures. It was observed that the evolution of the crystallographic structures of Cr films was very sensitive to both deposition conditions and film thickness. With the confocal deposition geometry, the Cr films developed various types of out-of-plane textures. In addition to the (110) and (100) types of textures commonly reported for vapor deposited Cr films, the (111) and (112) types of textures were also observed. The film deposited at low Ar pressure (2mTorr) developed ... |
| Databáze: | OpenAIRE |
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