On the silicon nitride film formation from N/sub 2/-SiH/sub 4/ electron cyclotron resonance plasma
| Autor: | null Sun-Kyu Song, null Hong-young Chang |
|---|---|
| Rok vydání: | 2005 |
| Zdroj: | IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma. |
| DOI: | 10.1109/plasma.1992.697984 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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