Stabilization of liquified-inert-gas jets for laser–plasma generation

Autor:	Oscar Hemberg, Hans M. Hertz, Björn Hansson, Magnus Berglund
Rok vydání:	2004
Předmět:	Physics Jet (fluid) Astrophysics::High Energy Astrophysical Phenomena Extreme ultraviolet lithography Nozzle General Physics and Astronomy Mechanics Plasma Radiation Laser law.invention law Physics::Space Physics High Energy Physics::Experiment Atomic physics Inert gas
Zdroj:	Journal of Applied Physics. 95:4432-4437
ISSN:	1089-7550 0021-8979
Popis:	We investigate the hydrodynamic properties of liquified-inert-gas jets in a vacuum with a special emphasis on their stability. Such jets have applications as targets for laser–plasma generation of soft-x-ray and extreme-ultraviolet (EUV) radiation. An important example is the liquid-xenon-jet laser-plasma source, one of the source candidates for EUV lithography. A simple hydrodynamic model in not sufficient to explain experimental observations of jet stability. Evaporation-induced cooling explains observed in-flight freezing of the jet and may be a key factor influencing jet stability. It is shown how the jet stability, and, thus, the stability of the laser–plasma x-ray and EUV emission, are improved by applying localized heating to the tip of the jet-generating nozzle.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bf308f5eb06ca2a8d63d262cf8254338 https://doi.org/10.1063/1.1687037 Zobrazit plný text záznamu