Sputtered ITO for application in thin-film silicon solar cells: Relationship between structural and electrical properties
| Autor: | Vladimir Smirnov, E. Marins, Jürgen Hüpkes, Lothar Spiess, Ivan Hotovy, W. Böttler, Th. Kups, Jaroslav Kováč, J. Hotovy |
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| Rok vydání: | 2013 |
| Předmět: |
Materials science
Morphology (linguistics) Silicon General Physics and Astronomy chemistry.chemical_element Nanotechnology 02 engineering and technology Substrate (electronics) 01 natural sciences 7. Clean energy Electrical resistivity and conductivity 0103 physical sciences Thin film 010302 applied physics business.industry Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure Surfaces Coatings and Films Indium tin oxide chemistry Optoelectronics 0210 nano-technology business |
| Zdroj: | Applied Surface Science. 269:81-87 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2012.10.180 |
| Popis: | Indium tin oxide (ITO) thin films for application in thin-film silicon solar cells with superior electrical and optical properties (resistivity ranging from 1.4 to 8.4 × 10 −4 Ω cm; transparency of >80%) have been investigated. ITO layers were deposited by radio-frequency (RF) magnetron sputtering process at different argon gas pressures and substrate temperatures ranging from room temperature to 280 °C. The main goal was to identify the relationship between structural and electrical properties. Generally, ITO layers were rather smooth with granular topography; electro-optically superior layers exhibited substantially different surface morphology of large, well-organized domain formations. Hall mobility of remarkably high value of 49 cm 2 /V s (resistivity of 2.6 × 10 −4 Ω cm) was achieved for the ITO layers, which were deposited at surprisingly low temperature of 125 °C. ITO process has been successfully applied, even at room temperature, to fabricate front contacts for microcrystalline silicon solar cells, exhibiting excellent performance on both rigid and flexible substrates. |
| Databáze: | OpenAIRE |
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