A Study of a Single-Wafer Process in Metal Contact Hole Cleaning

Autor:	Leo Archer, Tae-gyun Kim, Eun Su Rho, Han Mil Kim, Bong Ho Moon, Hee Kang Cho, Won Ho Cho, Jae Yong Park, Jong Kook Song
Rok vydání:	2007
Předmět:	Metal Materials science visual_art Metallurgy visual_art.visual_art_medium Process (computing) General Materials Science Wafer Condensed Matter Physics Contact hole Atomic and Molecular Physics and Optics
Zdroj:	Solid State Phenomena. 134:177-180
ISSN:	1662-9779
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::beed141eda9223cffc827d73f86454c7 https://doi.org/10.4028/www.scientific.net/ssp.134.177 Zobrazit plný text záznamu