Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer
| Autor: | Takuya Oshima, Takashi Sato, Hideto Endo, Masashi Ohkawa, Yusuke Miura |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Materials science Guided wave testing Silicon business.industry Physics::Medical Physics Physics::Optics chemistry.chemical_element musculoskeletal system Accelerometer Computer Science::Other law.invention Silicon based Optics chemistry Computer Science::Systems and Control law Proof mass business Waveguide Diaphragm (optics) |
| Zdroj: | Integrated Optics: Devices, Materials, and Technologies XV. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.873660 |
| Popis: | Our group has developed a silicon-based guided-wave optical accelerometer with a proof mass centered on a diaphragm. For this type of accelerometer, it is strongly suggested that sensitivity is related to waveguide position, diaphragm dimensions, and size and weight of proof mass. In this study, sensitivity dependences on waveguide position and diaphragm thickness were considered experimentally. Experimental results demonstrated that the highest sensitivity could be obtained for the waveguide at the diaphragm edge and is inversely proportional to the square of the diaphragm thickness. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|