Fabrication of probe tips via the FIB method for nanodiagnostics of the surface of solids by atomic force microscopy

Autor:	D J Rodriguez, A V Kotosonova, H A Ballouk, N A Shandyba, O I Osotova, A S Kolomiytsev
Rok vydání:	2021
Předmět:	History Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 2086:012204
ISSN:	1742-6596 1742-6588
Popis:	In this work, we carried out an investigation of commercial atomic force microscope (AFM) probes for contact and semi-contact modes, which were modified by focused ion beam (FIB). This method was used to modify the original tip shape of silicon AFM probes, by ion-etching and ion-enhance gas deposition. we show a better performance of the FIB-modified probes in contrast with the non-modified commercial probes. These results were obtained after using both probes in semi-contact mode in a calibration grating sample.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::be84156cc0ab3c4303289b300701d8c1 https://doi.org/10.1088/1742-6596/2086/1/012204 Zobrazit plný text záznamu