State-of-the-Art X-Ray Photoelectron Spectroscopy (XPS): Conventional and Synchrotron X-Ray Sources for Micro-XPS

Autor: G.D. Ackermann, Zahid Hussain, Edward L. Principe, Howard A. Padmore, A.L. Johnson, Robert W. Odom
Rok vydání: 1998
Předmět:
Zdroj: MRS Proceedings. 524
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-524-221
Popis: This paper presents preliminary data on analyses of selected materials using two state-ofthe- art XPS systems: the Physical Electronics Inc. (PHI, Eden Prairie, MN) Quantum 2000 instrument and the microXPS beamline (7.3.2.1) at the Advanced Light Source (ALS). This research compares and contrasts relevant performance characteristics of the two systems including elemental and chemical state detection sensitivity, imaging capabilities including lateral resolution and useful image fields, role of X-ray dose damage to surface, analysis speed as well as analytical throughput.
Databáze: OpenAIRE
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