| Autor: |
M.K. Lim, D.T. Chang, R. L. Kubena, Tsung-Yuan Hsu, Robert T. M'Closkey, R. J. Joyce, F. P. Stratton |
| Rok vydání: |
2005 |
| Předmět: |
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| Zdroj: |
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 23:2979 |
| ISSN: |
0734-211X |
| DOI: |
10.1116/1.2121731 |
| Popis: |
The use of nanomechanical resonators for chemical and bioagent detection has attracted a large amount of interest in recent years, since the mass noise floor scales directly with the mass of the resonator for a given frequency stability. In order for this technology to be applied to hand-held units, the resonators should ideally be integrated with the oscillator and counter electronics, have high-Q and high frequency stability in air, and have low-temperature sensitivity. We present a quartz-based ultrahigh-frequency resonator/oscillator technology that addresses these important issues. Miniaturized shear-mode resonators with frequencies approaching 3GHz and f×Q products of >1.0×1013Hz have been fabricated on Si using low-temperature wafer bonding and deep reactive ion quartz etching. Allan deviation levels of 1.0×10−8 for 100s integration times have been measured for a 326MHz Pierce oscillator design. In addition, the temperature stability matches that expected for AT-cut crystal resonators. We present p... |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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