Statistical analysis of retention behavior and lifetime prediction of HfOBxB-based RRAM

Autor: Wen-Hsing Liu, Yen-Ya Hsu, Yu-Sheng Chen, Pei-Yi Gu, Lijie Zhang, Frederick T. Chen, Ru Huang, Heng-Yuan Lee, Shun-Min Wang, Ming-Jinn Tsai, Wei-Su Chen, Chen-Han Tsai, Pang-Shiu Chen
Rok vydání: 2011
Předmět:
Zdroj: 2011 International Reliability Physics Symposium.
DOI: 10.1109/irps.2011.5784591
Popis: In this paper, statistical measurements on the retention behavior of the stable HfOB x -based RRAM under various thermal/voltage/cycling stresses are investigated. Testing results show that, data retention of high resistance state (HRS) of a RRAM is insensitive to temperature and cycling-aging. An empirical equation involving the voltage/thermal/cycling-stress acceleration is given for lifetime prediction. 10 years lifetime can be obtained with a constant read voltage of 0.2 V even at 160 °C. Also the set time of the RRAM extrapolated by the empirical equation coincides with the experiment value. In addition, the shallow Weibull slope of the retention time can be improved when the variations of the initial resistance is well controlled.
Databáze: OpenAIRE