Evaluation of Detection Angle Change Mechanism of High Resolution RBS System

Autor:	Hirofumi Fukuyama, Masaaki Maehara, Kimura Makoto, Takahiro Yuki
Rok vydání:	2008
Předmět:	Materials science Ion beam Channel (digital image) Spectrometer Physics::Instrumentation and Detectors business.industry Mechanical Engineering Detector Repeatability Edge (geometry) Industrial and Manufacturing Engineering Optics Mechanics of Materials Position (vector) Goniometer business
Zdroj:	TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 74:2089-2091
ISSN:	1884-8354 0387-5024
DOI:	10.1299/kikaic.74.2089
Popis:	A new high resolution RBS (HRBS) system consisting of a magnetic spectrometer and a compact vertical small accelerator is developed. A detection angle change mechanism rotating around Y axis combined a spectrometer, a measurement chamber, a goniometer and a detection chamber is newly designed and installed. In order to evaluate stability and repeatability of a detection angle change mechanism, Si element peak edge channel on a position sensitive detector is measured by using ion beam. Edge position repeatability less than 1 channel for atomic level surface characterization has been performed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bde28be9125e3f80e40a917c23e72737 https://doi.org/10.1299/kikaic.74.2089 Zobrazit plný text záznamu