Photonics Integrated PiezoMEMS-PipMEMS: A Scalable Hybrid Platform for Next-Generation MEMS
| Autor: | Sudhanshu Tiwari, Rudra Pratap, Viphretuo Mere, Akshay Naik, Rakshitha Kallega, Shankar Kumar Selvaraja, Aneesh Dash |
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| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
Silicon photonics Materials science business.industry Resonance 02 engineering and technology 021001 nanoscience & nanotechnology Chip 01 natural sciences 010309 optics 0103 physical sciences Scalability Optoelectronics Electrical and Electronic Engineering Photonics 0210 nano-technology business Instrumentation Laser Doppler vibrometer Beam (structure) |
| Zdroj: | IEEE Sensors Letters. 4:1-4 |
| ISSN: | 2475-1472 |
| Popis: | In this letter, we present a photonics integrated piezoMEMS (PipMEMS) platform for next-generation MEMS. We demonstrate on-chip optical transduction of a piezoMEMS structure. We use a heterogeneous 3D-bonding approach to integrate silicon photonics interrogator chip and lead–zirconate–titanate (PZT)-based MEMS device. We report on-chip measurements of three resonance modes of the PiezoMEMS beam that shows an excellent agreement with conventional laser Doppler vibrometer measurement. We also demonstrate measurement in a vacuum with one order of magnitude improvement in the quality factor of the fundamental resonance mode. |
| Databáze: | OpenAIRE |
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