Adsorption and detection of microparticles using silicon microcantilevers
Autor: | Maik Bertke, Michael Fahrbach, Prabowo Puranto, W. Ombati Nyang’au, Erwin Peiner, Jiushuai Xu, Gerry Hamdana, Hutomo Suryo Wasisto, Andi Setiono |
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Rok vydání: | 2019 |
Předmět: | |
Zdroj: | Journal of Physics: Conference Series. 1319:012010 |
ISSN: | 1742-6596 1742-6588 |
DOI: | 10.1088/1742-6596/1319/1/012010 |
Popis: | This paper presents a droplet-based method for detecting the mass of fluid-based microparticles. The degree of wettability on silicon-based substrates is therefore investigated for enhanced adsorption of microparticles. Contact angles of 47.3° (pre-treatment) and below 9° (enhanced hydrophilicity upon oxygen plasma treatment) have been realized. Segments of mono-layered particles on the substrate and the possibility of homogenous distribution are also demonstrated. The volume and the surface-contact area of droplets on the substrate have been determined, hence empowering an envisaged optimized design of a particle-well cantilever. The determination of the mass of adsorbed microparticles on the cantilever has also been investigated. |
Databáze: | OpenAIRE |
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