A study on field-emission array pressure sensors
| Autor: | Hsien-Chung Lee, Ruey-Shing Huang |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
Engineering
Reproducibility Fabrication business.industry Metals and Alloys Electrical engineering Condensed Matter Physics Pressure sensor Cathode Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Field electron emission law Optoelectronics Microelectronics Dry etching Electrical and Electronic Engineering business Instrumentation Common emitter |
| Zdroj: | Sensors and Actuators A: Physical. 34:137-154 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/0924-4247(92)80185-6 |
| Popis: | In view of the specific advantages of using vacuum as the device medium and a field-emission cathode as electron source, a renewed interest in vacuum microelectronics utilizing advanced IC technology is emerging. This paper presents an application of field-emission arrays in a novel pressure sensor. Both cone-shaped and wedge-shaped emitter arrays are studied. Various wet and dry etching techniques for forming the emitter arrays are compared. A combined wet/dry fabrication process is developed to achieve array uniformity and reproducibility. The characteristics of a pressure sensor with an ideal field-emission array are simulated, and methods to take into consideration the non-uniformity of array tips, an inevitable result of the fabrication process, are also discussed. The performance of a fabricated pressure sensor with a cone-shaped emitter array is evaluated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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