Structural characterization of heavily Zn-doped liquid encapsulated Czochralski InP

Autor: J. L. Weyher, Roberto Fornari, C. Frigeri, C. Ferrari, G.M. Guadalupi, F. Longo
Rok vydání: 1994
Předmět:
Zdroj: Materials Science and Engineering: B. 28:120-125
ISSN: 0921-5107
DOI: 10.1016/0921-5107(94)90029-9
Popis: A structural characterization of liquid encapsulated Czochralski InP heavily doped with Zn is presented. At a hole density as high as 3.0 × 10 18 cm −3 , corresponding to a Zn content of 1019 atoms cm−3, the crystals are dislocation-free. They contain, however, a high density ( ca. 7 × 10 9 cm −3 ) of precipitates identified as Zn3P2 by electron diffraction. This supports the model in which Zn in excess of that occupying In sites as electrically active acceptor can react with the group V element to form precipitates. Other possible lattice locations of the excess Zn cannot be checked by our techniques. The Zn3P2 precipitates tend to disappear for a hole concentration of 2.6 × 10 18 cm −3 , but dislocations are generated since the hardening effect associated with dopant atoms decreases. The majority of the dislocations have climbed, leaving behind a local high density of microdefects. The possible mechanisms for the generation of these microdefects are discussed.
Databáze: OpenAIRE