Surface micromachined force gauges: uncertainty and reliability
| Autor: | Jonathan W. Wittwer, Larry L. Howell, Troy Gomm |
|---|---|
| Rok vydání: | 2001 |
| Předmět: |
Microelectromechanical systems
Engineering Precision engineering business.industry Mechanical Engineering Force gauge Mechanical engineering Gauge (firearms) Electronic Optical and Magnetic Materials Surface micromachining Mechanics of Materials Electronic engineering Probabilistic design Electrical and Electronic Engineering business Beam (structure) Reliability (statistics) |
| Zdroj: | Journal of Micromechanics and Microengineering. 12:13-20 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/12/1/303 |
| Popis: | Surface micromachining of micro-electro-mechanical systems (MEMS), like all other fabrication processes, has inherent variation that leads to uncertain material and dimensional parameters. By considering the effects of these variations during the design of micro force gauges, the gauge uncertainty and reliability can be estimated. Without the means of calibrating micro gauges, these effects are often significant when compared to experimental repeatability. The general force gauge model described in this paper can be used to measure a wide range of forces, and simple design changes can lead to improved accuracy in measurement. A method of probabilistic design is described that is not limited to small beam deflections. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|