Resist Removal by Laser Irradiation and Adhesion between Resist and Substrate

Autor:	Masayuki Fujita, Hideo Horibe, Tomosumi Kamimura, Akira Yoshikado, Nishiyama Itsuo
Rok vydání:	2005
Předmět:	Materials science Resist Chemical engineering law Adhesion Substrate (printing) Irradiation Laser law.invention
Zdroj:	Journal of The Adhesion Society of Japan. 41:223-226
ISSN:	2187-4816 0916-4812
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bd665332a56832fc17911f7206e4fb10 https://doi.org/10.11618/adhesion.41.223 Zobrazit plný text záznamu