Study of nanoscale metal oxide coatings produced by magnetron sputtering of copper followed by heat treatment
| Autor: | K. G. Elanskaia, I N Kashkul, Dmitrii Redka, L. D. Bakhchova |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Metallurgy Oxide chemistry.chemical_element 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Copper Metal chemistry.chemical_compound chemistry visual_art 0103 physical sciences visual_art.visual_art_medium 0210 nano-technology Nanoscopic scale |
| Zdroj: | IOP Conference Series: Materials Science and Engineering. 387:012030 |
| ISSN: | 1757-899X 1757-8981 |
| DOI: | 10.1088/1757-899x/387/1/012030 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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