A Structural Study of the Amorphous to Crystalline Transformation in In2O3 Thin Films

Autor:	Burag Yaglioglu, Hyo-Young Yeom, Eric Chason, David C. Paine
Rok vydání:	2002
Předmět:	Bond length Materials science Carbon film Amorphous carbon Electron diffraction Crystal structure Selected area diffraction Thin film Molecular physics Amorphous solid
Zdroj:	MRS Proceedings. 747
ISSN:	1946-4274 0272-9172
Popis:	We have investigated the structure of sputter deposited amorphous and crystalline indium oxide films by electron diffraction. Selected area diffraction patterns were recorded for both states from which radial density functions were derived. The comparison of the crystalline radial density function to the amorphous one shows that the first nearest neighbor distance corresponding to the In-O bond length is 2.2Å and is the same for both states. A model density function for crystalline structure was used to explore the difference in higher order peak positions. We report that the In-In separation in amorphous state has a single characteristic distance of 3.6Å compared to the crystalline state which has two non-equivalent In sites and consequently different separations as In(1)-In(2) at 3.4Å and In(2)-In(2) at 4.3Å.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bd4e1d6b39de6acb4af515c91011ed18 https://doi.org/10.1557/proc-747-v6.6 Zobrazit plný text záznamu Full text from SpringerLink