Soft mask-based dry etching of parylene AF4 for advanced packaging applications
| Autor: | Mohamed Lamine Faycal Bellaredj, Nikolai Andrianov, Robin Kaufhold, Goran Miskovic |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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