A summary of applications of uncooled microbolometer sensors

Autor:	Todd W. Parker, N. Piscitelli, Margaret Kohin, Charles A. Marshall, Raymond J. Silva, Robert H. Murphy, T. Breen, Neal R. Butler
Rok vydání:	1999
Předmět:	Materials science Silicon business.industry Bolometer chemistry.chemical_element Microbolometer law.invention Optical imaging chemistry law Infrared image sensors Optoelectronics Wafer Image sensor business
Zdroj:	1999 IEEE Aerospace Conference. Proceedings (Cat. No.99TH8403).
Popis:	Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled infrared imaging products for both military and commercial applications. These products are based on microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here we report on several applications that are utilizing the Lockheed Martin microbolometer sensor.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bd394f81876d3bdba90297d4192b9376 https://doi.org/10.1109/aero.1999.789796 Zobrazit plný text záznamu