Co-Containing Ferrite Thin-Film Deposited on Organic Flexible Film Substrate

Autor: Hiroki Kurisu, Takanori Doi, Kei Hirata, Mitsuru Matsuura, Setsuo Yamamoto, Kousaku Tamari
Rok vydání: 2001
Předmět:
Zdroj: Journal of the Japan Society of Powder and Powder Metallurgy. 48:748-752
ISSN: 1880-9014
0532-8799
Popis: Co-containing ferrite thin films were successfully deposited on organic flexible substrates by the reactive sputtering method using-an electron cyclotron resonance microwave plasma at a temperature lower than 150°C. The ferrite thin films had an amorphous-like structure, perpendicular magnetic anisotropy and high perpendicular coercivity of about 170kA/m. The perpendicular coercivity increased with increasing substrate thickness. Inserting SiO2 underlayer between organic flexible substrate and ferrite thin films enhanced the perpendicular coercivity.
Databáze: OpenAIRE