Numerical analysis of SOI LDMOS using a recessed source and a trench drain

Autor: S.-J Yoo, Sang-Koo Chung, Y.-I Choi, Sung Ho Kim
Rok vydání: 2000
Předmět:
Zdroj: Microelectronics Journal. 31:963-967
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(00)00094-x
Popis: A new SOI LDMOS using a recessed source and a trench drain was proposed to improve the on-characteristics at a given breakdown voltage. On-resistance and breakdown voltages of the proposed LDMOS are investigated by the two-dimensional simulator, MEDICI. The simulation results show that the on-resistance of the proposed and the conventional LDMOS are 76.3 and 129.5 m Ω mm 2 , respectively. The on-resistance of the proposed LDMOS decreases by 41% compared to that of the conventional LDMOS at the same breakdown voltage of 36.5 V.
Databáze: OpenAIRE