Sheet resistance measurements of carbon nanotube forests for extended electrodes
| Autor: | M. DeMiguel-Ramos, Teona Mirea, Marta Clement, Enrique Iborra, Jesús Sangrador, B. Díaz-Durán, Jimena Olivares |
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| Rok vydání: | 2016 |
| Předmět: |
Nanotube
Materials science Bar (music) Mechanical Engineering Nanotechnology 02 engineering and technology General Chemistry Carbon nanotube Chemical vapor deposition 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Electronic Optical and Magnetic Materials law.invention Capacitor law Electrode Materials Chemistry Area density Electrical and Electronic Engineering Composite material 0210 nano-technology Sheet resistance |
| Zdroj: | Diamond and Related Materials. 61:70-75 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2015.11.012 |
| Popis: | Owing to their outstanding electrical properties, carbon nanotubes (CNTs) are currently being considered as interconnects in microelectronic circuits and large area electrodes. For large area electrodes, CNT must grow as dense and vertically aligned forests, displaying sheet resistances as low as possible. Here we present two straightforward methods for the assessment of the sheet resistance of CNT forests. The first one is based on the DC electrical characterization of a CNT forest bar with distributed Mo contacts. The second consists in RF measurements, at different frequencies, of capacitors containing CNT forests as top electrodes. The two methods enable to assess the sheet resistance of multi-walled CNT forests grown by chemical vapor deposition on SiO 2 substrates using thin Fe catalyst layers grown on thin Ti stabilizer films. DC characterization points out to a clear dependency of the CNT sheet resistance on the thickness of Fe catalyst, which can be related to the CNT area density. Additionally, the variations of the capacitor effective area stressed by RF measurements confirm this dependency and provide us with a method for the estimation of nanotube area density. |
| Databáze: | OpenAIRE |
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